Method of manufacturing a fixed abrasive material

Details Method of manufacturing a fixed abrasive material Method of manufacturing a fixed abrasive material

2006-06-27

2006-06-27

Hail, III, Joseph J. (Department: 3723)

Abrading

Flexible-member tool, per se

C451S041000, C451S529000, C483S064000

Reexamination Certificate

active

07066801

ABSTRACT:
Provided is a method for manufacturing a fixed abrasive material suitable for use in CMP planarization pads from an aqueous polymer dispersion that also includes abrasive particles that involves frothing the polymer dispersion, applying the froth to a substrate, mold or carrier and curing the froth to form a fixed abrasive material having an open cell structure containing between about 5 and 85 wt % abrasive particles and a dry density of about 350 kg/m3to 1200 kg/m3.

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