Method of manufacturing a field emission cold cathode capable of

Details Method of manufacturing a field emission cold cathode capable of Method of manufacturing a field emission cold cathode capable of

1997-05-08

1999-08-17

O'Shea, Sandra

Electric lamp or space discharge component or device manufacturi

Process

With assembly or disassembly

445 59, H01J 902

Patent

active

059384956

ABSTRACT:
In a method of manufacturing a field emission cold cathode which has an emitter chip (25) of a metal material on a conductive layer (21) and is placed in a predetermined vacuum, a protection film (26) is formed on the emitter chip to prevent an unfavourable layer from being formed directly on the emitter chip. The protection film is removed from the emitter chip at a time when the field mission cold cathode is placed in the predetermined vacuum. On the conductive layer, an insulation layer (22) and a gate electrode layer (23) are formed to define a cavity (24). In the cavity, the emitter chip is formed on an exposed surface (21a) of the conductive layer.

REFERENCES:
patent: 5735721 (1998-04-01), Choi
Spindt et al., "Physical Properties of Thin-Film Field Emission Cathodes With Molybdenum Cones", Journal Of Applied Physics, vol. 47(12):pp. 5248-5263, (1976).
Bauer et al., "The Interaction of Oxygen With The Mo(100) Surface", Surface Science, vol. 88:31-59, (1979) pp. 31-59.
Floquet et al., "Superficial Oxidation Of Molybdenum At High Pressure And Low Temperature: RHEED and AES Analyses Of The Molybdenum Oxide Formation", Surface Science, vol. 251/252:1044-1049, (1991) pp. 1044-1049.
H.S. Kim and M.L. Yu, "Oxygen processed field emission tips for microcolumn applications", Journal of Vacuum Science & Technology B, vol. 11 (6), Nov./Dec. 1993, pp. 2327-2331.
P.R. Schwoebel and C.A. Spindt, "Field-emitter array performance enhancement using hydrogen glow discharges", Applied Physics Letters, Lett. 63(1), Jul. 5, 1993, pp. 33-35.

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