Method of manufacturing a ferroelectric capacitor configuration

Details Method of manufacturing a ferroelectric capacitor configuration Method of manufacturing a ferroelectric capacitor configuration

2005-02-08

2005-02-08

Vinh, Lan (Department: 1765)

Etching a substrate: processes

Forming or treating material useful in a capacitor

C216S074000, C438S240000, C438S255000

Reexamination Certificate

active

06852240

ABSTRACT:
A ferroelectric capacitor configuration is configured with at least two different coercitive voltages. A first electrode structure having a surface which forms at least two levels is firstly produced. A layer of ferroelectric material of varying thickness is deposited over the first electrode by spin coating. A second electrode structure is subsequently formed on the layer of ferroelectric material.

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