Method of manufacturing a DMOS

Fishing – trapping – and vermin destroying

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

437 44, 437150, 437151, 437203, 437228, 437984, 437947, 148DIG111, 148DIG126, 148DIG131, 148DIG103, H01L 21316

Patent

active

048792543

ABSTRACT:
A method for manufacturing a DMOS which comprises forming a first conductive type layer on a substrate, forming a gate oxide layer thereon, forming a gate electrode layer and a second insulating layer successively on the gate oxide layer, forming a second conductive type body region and a first conductive type source region having a narrower width by implanting impurities utilizing the second insulating layer as a mask, forming a side wall spacer of an insulating material on at least a side portion of the gate electrode, forming a conductive passage penetrating the source region and extending into the body region while utilizing the second insulating layer and the side wall spacer as mask, optionally implanting the exposed body region, further excessively etching the sidewall spacer, the masking layer overlying the gate, and the gate oxide prior to providing an electrode connecting the source and body regions.

REFERENCES:
patent: 4430792 (1984-02-01), Temple
patent: 4503598 (1985-03-01), Vora et al.
patent: 4567641 (1986-02-01), Baliga et al.
patent: 4598461 (1986-07-01), Love
IEEE Electron Device Letters, vol. EDL-8, No. 4, Apr. 1987, Huang et al., "A New LDD Transistor with Inverse-T Gate Structure", (pp. 151-153).
IEEE Transactions on Electron Devices, vol. ED-31, No. 4, Apr. 1984, Ueda et al., "A New Vertical Double Diffused MOSFET-The Self-Aligned Terraced-Gate MOSFET", (pp. 416-420).

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Method of manufacturing a DMOS does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of manufacturing a DMOS, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of manufacturing a DMOS will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-83711

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.