Method of manufacturing a diamond vacuum device

Details Method of manufacturing a diamond vacuum device Method of manufacturing a diamond vacuum device

1998-08-20

2000-03-21

King, Roy V.

Coating processes

Electrical product produced

Electron emissive or suppressive

4272499, 427250, 42725527, 4272557, B05D 512, C23C 1600

Patent

active

060400013

ABSTRACT:
This invention discloses a method of manufacturing a diamond vacuum device, and more particularly a method of manufacturing a diamond vacuum device which uses a diamond thin film as an electron emitter by electric field. The present invention presents a method of manufacturing a vacuum device for use in high speed, high voltage, using diamond having a negative electron affinity, which can emit electrons even at a low voltage and is also resistant to chemical variations.

REFERENCES:
patent: 5478650 (1995-12-01), Davanloo et al.
S. Zurn, Q. Mei, C. Ye, T. Tamagawa and D.L. Polla; Sealed Vacuum Electronic Devices by Surface Micromachining; 1991; pp. 205-208.

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