Method of manufacturing a device, device manufactured...

Photocopying – Projection printing and copying cameras – Illumination systems or details

Reexamination Certificate

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C355S053000

Reexamination Certificate

active

10738980

ABSTRACT:
During scanned exposure of target portions at the edge of the substrate, the position of an edge of the illumination field is changed so as to prevent or reduce radiation falling onto the substrate table or to expose an L-shaped area. In this way the heat load on the substrate table can be reduced and dummy structures can fill a mouse bite without overlapping an alignment mark.

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patent: WO 03/032082 (2003-04-01), None
Japanese Office Action issued for Japanese Patent Application No. 2003-420697, dated Jan. 16, 2007.

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