Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2007-05-29
2007-05-29
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000
Reexamination Certificate
active
10738980
ABSTRACT:
During scanned exposure of target portions at the edge of the substrate, the position of an edge of the illumination field is changed so as to prevent or reduce radiation falling onto the substrate table or to expose an L-shaped area. In this way the heat load on the substrate table can be reduced and dummy structures can fill a mouse bite without overlapping an alignment mark.
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Japanese Office Action issued for Japanese Patent Application No. 2003-420697, dated Jan. 16, 2007.
Ottens Joost Jeroen
Van Kervinck Marcel Nicolaas Jacobus
ASML Netherlands B.V.
Nguyen Henry Hung
Pillsbury Winthrop Shaw & Pittman LLP
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