Fishing – trapping – and vermin destroying
Patent
1993-05-07
1995-04-25
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437203, 437184, 257280, 257284, 156644, H01L 21265
Patent
active
054098491
ABSTRACT:
According to this invention, there is provided a method of manufacturing a compound semiconductor which can be formed at a high yield and in which variations in characteristics of elements caused by variations in distances between a source and a gate and between a drain and the gate can be minimized. In addition, there is provided a compound semiconductor device having a structure capable of increasing a power gain and obtaining a high-speed operation. According to this invention, an active layer is formed on a compound semi-conductor substrate, and source/drain electrodes are formed on the active layer to be separated from each other. The wall insulating films are respectively formed on side walls of the electrodes, and a gate electrode is formed between the side wall insulating films to be respectively in contact therewith.
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Fukuda Toshikazu
Imamura Souichi
Kishita Yoshihiro
Ochi Masanori
Gurley Lynne A.
Hearn Brian E.
Kabushiki Kaisha Toshiba
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