Method of manufacturing a coil inductor

Details Method of manufacturing a coil inductor Method of manufacturing a coil inductor

2008-01-25

2010-02-23

Smoot, Stephen W (Department: 2813)

Semiconductor device manufacturing: process

Having magnetic or ferroelectric component

C438S381000, C257SE21022

Reexamination Certificate

active

07666688

ABSTRACT:
A method of manufacturing a coil inductor and a coil inductor are provided. A plurality of conductive bottom structures are formed to be lying on a first dielectric layer. A plurality pairs of conductive side structures are then formed, wherein each pair of the conductive side structure stand on top surface of a first end and a second end of each conductive bottom structure respectively; a second dielectric layer is formed on the first dielectric layer, coating the bottom and side structures; and a plurality of conductive top structures are formed to be lying on the second dielectric layer, wherein each conductive top structure electrically connects each pair of the conductive side structures, wherein the conductive bottom structures, the conductive side structures and the conductive top structures together form a conductive coil structure.

REFERENCES:
patent: 6291305 (2001-09-01), Huang et al.
patent: 6614093 (2003-09-01), Ott et al.
patent: 7417525 (2008-08-01), Lee et al.
patent: 2002/0050626 (2002-05-01), Onuma et al.
patent: 2002/0097129 (2002-07-01), Johnson
patent: 2003/0122647 (2003-07-01), Ou
patent: 2004/0004266 (2004-01-01), Furumiya et al.
patent: 2004/0104449 (2004-06-01), Yoon et al.

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