Method of manufacturing a chemically adsorbed film

Coating processes – Coating by vapor – gas – or smoke – Plural coatings applied by vapor – gas – or smoke

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427333, 427537, C23C 1424

Patent

active

053728513

ABSTRACT:
This invention aims to form uniformly and effectively an ultra thin chemical adsorbing film having an excellent water repellent property, oil repellent property, and contamination-proof property on the surface of a substrate by chemically adsorbing in a gas phase atmosphere. A chemically adsorbed film can be formed on any type of substrate and in a short time by chemically adsorbing a chlorosilane based surface-active agent on the surface of a substrate having active hydrogen groups. Further, a chemically adsorbed monomolecular film, or a polymer film, can be formed on any type of substrate and in a short time by forming a siloxane based monomolecular film or a polysiloxane adsorbed film in a gas atmosphere having a chlorosilane based surface-active agent having plurality of chlorosilyl groups.

REFERENCES:
patent: 2557786 (1951-06-01), Johannson
patent: 4539061 (1985-09-01), Sagiv
patent: 4810564 (1989-03-01), Takahashi et al.
patent: 4961996 (1990-10-01), Carre et al.

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