Fishing – trapping – and vermin destroying
Patent
1993-11-05
1995-08-22
Thomas, Tom
Fishing, trapping, and vermin destroying
437 47, 437 52, 437238, H01L 218242
Patent
active
054440068
ABSTRACT:
A method of manufacturing a capacitor in a semiconductor device such as a semiconductor memory is disclosed in which a tantalum layer is oxidized to form a tantalum oxide layer. A preferred embodiment of the disclosed method includes the steps of depositing doped polysilicon on a semiconductor substrate to form a node electrode, oxidizing the polysilicon node electrode to form a silicon oxide layer, depositing tantalum by way of a sputtering process, performing an annealing and oxidation process to form tantalum oxide and depositing polysilicon to form a plate electrode. According to the present invention, TaCl.sub.5 is not used as a solid source, and contamination can be reduced.
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Han Jeong-Su
Lee Seung-hee
Goldstar Electron Co. Ltd.
Loudermilk Alan R.
Thomas Tom
LandOfFree
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