Method of manufacturing a capacitive humidity sensor

Details Method of manufacturing a capacitive humidity sensor Method of manufacturing a capacitive humidity sensor

1991-08-28

1993-10-19

Lusigan, Michael

Coating processes

Direct application of electrical, magnetic, wave, or...

Polymerization of coating utilizing direct application of...

427525, 427560, 427601, 427 79, 4271263, 427203, 427204, 427346, 427387, 427409, 4274192, 427421, 361178, B05D 512

Patent

active

052543714

ABSTRACT:
This method comprises the following steps, which are compatible with thin-film technology: forming a bottom electrode (2) on an insulating substrate (1), depositing a humidity-sensitive polymer layer (5) of uniform thickness on the bottom electrode (2) leaving contact areas (3a, 3b) uncovered, activating surface bonds of the polymer layer (5), applying a colloidal dispersion of SiO.sub.2 or Al.sub.2 O.sub.3 particles (6) of uniform grain size as a thin layer to the polymer layer (5) and subsequently drying it, depositing a cover electrode (7) on the particles (6) still evenly distributed on the polymer layer (5) after the drying of the dispersion, and removing the particles (6) together with the portions of the cover electrode (7) overlying them.

REFERENCES:
patent: 4438480 (1984-03-01), Chambaz et al.
patent: 4482882 (1984-11-01), Luder et al.
patent: 4532016 (1985-07-01), Chambaz et al.
patent: 4541904 (1985-09-01), Luder et al.
patent: 4603455 (1986-08-01), Woest et al.
patent: 4761710 (1988-08-01), Chen

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