Metal working – Electric condenser making
Patent
1994-12-05
1996-04-16
Hall, Carl E.
Metal working
Electric condenser making
7351432, 73724, 3612834, H01G 516
Patent
active
055070809
ABSTRACT:
A small and highly sensitive capacitance type pressure sensor is obtained by filling an alkali halide material such as KBr into a through-hole, forming a conductive thin film on the surface, and dissolving and removing the alkali halide material. An insulating plate disposed with a through-hole in the thickness direction is filled with a molten alkali halide material such as KBr. After forming a conductive thin film on the surface of the alkali halide material filled into the through-hole and the vicinity thereof, the alkali halide material is dissolved by water and removed. In this way, a diaphragm is made of the through-hole and the conductive thin film. A curve of the diaphragm caused by a pressure difference between the both faces of the conductive thin film is detected as a capacitance change between the conductive thin film and the electrode layer.
REFERENCES:
patent: 4530029 (1985-07-01), Beristain
patent: 4823230 (1989-04-01), Tiemann
patent: 5134886 (1992-08-01), Ball
patent: 5211058 (1993-05-01), Fukiura et al.
S. Y. Lee; "Variable Capacitance Signal Transduction and the Comparison with other Transduction Schemes", Process Instrumentation, vol. 1, No. 3, Jun. 1972, pp. 138-143.
Patent Abstracts of Japan, vol. 15, No. 311 (Aug. 8, 1991).
Hayashi Shigenori
Hirao Takashi
Kamada Takeshi
Torii Hideo
Hall Carl E.
Matsushita Electric - Industrial Co., Ltd.
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