Method of manufacturing a buried-channel charge-coupled image se

Details Method of manufacturing a buried-channel charge-coupled image se Method of manufacturing a buried-channel charge-coupled image se

1991-03-25

1993-02-09

Fourson, G.

Fishing, trapping, and vermin destroying

437 27, 437958, 437 53, H01L 21266

Patent

active

051852713

ABSTRACT:
In a method of manufacturing a raster transfer image sensor, the charge transport channels and the channel-bounding regions and the vertical anti-blooming channels are formed in a self-registering manner in that the channel-bounding regions are provided via a mask, and the intervening charge transport channels are provided in a maskless doping step. Since this doping is also carried out in the channel-bounding regions, a doping profile favorable for the photosensitivity is obtained in the channel-bounding regions with a maximum concentration at a distance from the surface.

REFERENCES:
patent: 4649430 (1987-03-01), Hynecek
patent: 4994405 (1991-02-01), Jayakar

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