Method of manufacturing a body having a structure of layers

Details Method of manufacturing a body having a structure of layers Method of manufacturing a body having a structure of layers

1998-03-18

1999-12-07

Acquah, Samuel A.

Metal working

Method of mechanical manufacture

Electrical device making

4271261, 4271263, 4271264, 4271265, 427127, 4272071, 427307, 216 58, 216 76, 216 79, 216 95, 216102, 2960301, 2960317, 2960318, 2960319, 296032, 360125, 360126, G11B 5127, G11B 5147, B44C 122, B05D 512

Patent

active

059962127

ABSTRACT:
Method of manufacturing a multilayer structure, in which method gold is deposited on a basic layer (3, 11) for forming a gold layer (7, 13), whereafter aluminium oxide is deposited on the gold layer for forming an aluminium oxide layer (9, 15). Silicon oxide is deposited on the aluminium oxide layer by means of PE-CVD for forming a silicon oxide layer (11, 13), and the aluminium oxide layer constitutes an adhesive layer between the gold layer and the silicon oxide layer. Together with the aluminium oxide layer, the silicon oxide layer constitutes an insulating and/or protective cladding layer for the gold layer.

REFERENCES:
patent: 5225953 (1993-07-01), Wada et al.
patent: 5326429 (1994-07-01), Cohen et al.

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