Method of manufacturing a bipolar transistor having emitter seri

Fishing – trapping – and vermin destroying

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437 60, 437918, 357 34, H01L 21265

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047628049

ABSTRACT:
A method is set forth of manufacturing a bipolar transistor with emitter ballast resistors. According to the invention, a base window and a strip-shaped opening are formed beside each other on a collector region. The strip-shaped opening is first covered by a masking layer and then doping of the base is provided. After removal of the masking layer, oxide layers of the same thickness are formed in the base window and in the strip-shaped opening. After formation of emitter fingers, base contact windows are formed within the base zone, and resistance windows are formed within the strip-shaped opening, whereupon simultaneously base contact zones and mutually separated emitter ballast resistors are formed in these windows.

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patent: 4654687 (1987-03-01), Hebert
Ghandhi, S. K. "VLSI Fabrication Principals" 1983, pp. 354-357, 626-631.

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