Method of manufacture of a thermally actuated slotted...

Etching a substrate: processes – Forming or treating thermal ink jet article

Reexamination Certificate

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Reexamination Certificate

active

06245246

ABSTRACT:

STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT
Not applicable.
FIELD OF THE INVENTION
The present invention relates to the field of ink jet printing and, in particular, discloses a method of manufacture of a thermally actuated slotted chamber wall ink jet printer.
BACKGROUND OF THE INVENTION
Many ink jet printing mechanisms are known. Unfortunately, in mass production techniques, the production of ink jet heads is quite difficult. For example, often, the orifice or nozzle plate is constructed separately from the ink supply and ink ejection mechanism and bonded to the mechanism at a later stage (Hewlett-Packard Journal, Vol. 36 no 5, pp33-37 (1985)). These separate material processing steps required in handling such precision devices often add a substantial expense in manufacturing.
Additionally, side shooting ink jet technologies (U.S. Patent No. 4,899,181) are often used but again, this limits the amount of mass production throughput given any particular capital investment.
Additionally, more esoteric techniques are also often utilised. These can include electroforming of nickel stage (Hewlett-Packard Journal, Vol. 36 no 5, pp33-37 (1985)), electrodischarge machining, laser ablation (U.S. Patent No. 5,208,604), micro-punching, etc.
The utilisation of the above techniques is likely to add substantial expense to the mass production of ink jet print heads and therefore add substantially to their final cost.
It would therefore be desirable if an efficient system for the mass production of ink jet print heads could be developed.
SUMMARY OF THE INVENTION
It is an object of the present invention to provide for a method of manufacture of an ink jet printer device which includes a thermally actuated slotted chamber wall ink jet printer.
In accordance with a first aspect of the present invention, there is provided a method of manufacturing a thermally actuated slotted chamber wall ink jet print head wherein an array of nozzles are formed on a substrate utilizing planar monolithic deposition, lithographic and etching processes.
Multiple ink jet heads are preferably formed simultaneously on a single planar substrate which can comprise a silicon wafer.
The print heads are preferably formed utilizing standard vlsi/ulsi processing. The integrated drive electronics are preferably formed on the same substrate. The integrated drive electronics are formed using a CMOS fabrication process.
Ink can be ejected from the substrate substantially normal to the substrate.


REFERENCES:
patent: 5072241 (1991-12-01), Shibaike et al.
patent: 5211806 (1993-05-01), Wong et al.
patent: 5825383 (1998-10-01), Abe et al.
patent: 5872582 (1999-02-01), Pan
patent: 5970998 (1999-10-01), Talbot et al.
patent: 3-240547 (1991-10-01), None
patent: 4-201568 (1992-07-01), None
Krause, P. et al “A micromachined single-chip inkjet printhead” Sensors and Actuators A53 (1-3) pp 405-409, 1996.

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