Semiconductor device manufacturing: process – Manufacture of electrical device controlled printhead
Patent
1998-07-10
2000-08-29
Chaudhuri, Olik
Semiconductor device manufacturing: process
Manufacture of electrical device controlled printhead
347 54, B41J 204, H01L 2170, H01L 2100
Patent
active
061107549
ABSTRACT:
This patent describes a method of manufacturing a thermoelastic rotary impeller ink jet print head wherein an array of nozzles are formed on a substrate utilizing planar monolithic deposition, lithographic and etching processes. Multiple ink jet heads are formed simultaneously on a single planar substrate such as a silicon wafer. The print heads can be formed utilizing standard VLSI/ULSI processing and can include integrated drive electronics formed on the same substrate. The drive electronics preferably being of a CMOS type. In the final construction, ink can be ejected from the substrate substantially normal to the substrate plane.
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Chaudhuri Olik
Mao Daniel H.
Silverbrook Research Pty Ltd
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