Method of manufacture of a thermal elastic rotary impeller ink j

Details Method of manufacture of a thermal elastic rotary impeller ink j Method of manufacture of a thermal elastic rotary impeller ink j

1998-07-10

2000-08-29

Chaudhuri, Olik

Semiconductor device manufacturing: process

Manufacture of electrical device controlled printhead

347 54, B41J 204, H01L 2170, H01L 2100

Patent

active

061107549

ABSTRACT:
This patent describes a method of manufacturing a thermoelastic rotary impeller ink jet print head wherein an array of nozzles are formed on a substrate utilizing planar monolithic deposition, lithographic and etching processes. Multiple ink jet heads are formed simultaneously on a single planar substrate such as a silicon wafer. The print heads can be formed utilizing standard VLSI/ULSI processing and can include integrated drive electronics formed on the same substrate. The drive electronics preferably being of a CMOS type. In the final construction, ink can be ejected from the substrate substantially normal to the substrate plane.

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