Method of manufacture of a paddle type ink jet printer

Semiconductor device manufacturing: process – Manufacture of electrical device controlled printhead

Patent

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Details

347 20, 347 47, H01L 2100

Patent

active

060717505

ABSTRACT:
This patent describes a method of manufacturing a paddle type ink jet print head wherein an array of nozzles are formed on a substrate utilizing planar monolithic deposition, lithographic and etching processes. Multiple ink jet heads are formed simultaneously on a single planar substrate such as a silicon wafer. The print heads can be formed utilizing standard VLSI/ULSI processing and can include integrated drive electronics formed on the same substrate. The drive electronics preferably are of a CMOS type. In the final construction, ink can be ejected from the substrate substantially normal to the substrate plane.

REFERENCES:
patent: 5889541 (1999-03-01), Bobrow et al.

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