Method of making tunable thin film acoustic resonators

Details Method of making tunable thin film acoustic resonators Method of making tunable thin film acoustic resonators

1996-08-27

1999-02-23

Hall, Carl E.

Metal working

Piezoelectric device making

310324, 427100, H01L 4122

Patent

active

058731539

ABSTRACT:
An acoustical resonator comprising top and bottom electrodes that sandwich a PZ layer. The resonance frequency of the acoustical resonator may be adjusted after fabrication by utilizing heating elements included in the acoustical resonator and/or by adjusting the thickness of a tuning layer. In the preferred embodiment of the present invention, the electrodes comprise Mo layers. One embodiment of the present invention is constructed on a Si.sub.3 N.sub.4 membrane. A second embodiment of the present invention is constructed such that it is suspended over a substrate on metallic columns. In the preferred embodiment of the present invention, the electrodes are deposited by a method that minimizes the stress in the electrodes.

REFERENCES:
patent: 4320365 (1982-03-01), Black et al.
patent: 4456580 (1984-06-01), Inoue et al.

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