Method of making travelling wave semi-conductor laser

Details Method of making travelling wave semi-conductor laser Method of making travelling wave semi-conductor laser

1987-12-04

1989-07-25

Hearn, Brian E.

Fishing, trapping, and vermin destroying

148DIG51, 148DIG56, 148DIG95, 148DIG106, 148DIG111, 156644, 156649, 156656, 156662, 357 16, 372 94, 437133, 437228, 437231, 437936, H01L 21306

Patent

active

048513687

ABSTRACT:
A triangular ring laser utilizing total internal reflection at two angled facets and a preselected amount of reflection at a third angled facet is disclosed. Partial transmission occurs through the third facet to reduce the threshold current required for achieving stimulated emission. The facets are at three corners of the triangular laser, and are formed by chemically assisted ion beam etching in which SiO.sub.2 is used as a mask, whereby smooth vertical walls are produced to form facets having reflective characteristics equivalent to those formed by cleaving.

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