Method of making transparent polysilicon gate for imaging arrays

Details Method of making transparent polysilicon gate for imaging arrays Method of making transparent polysilicon gate for imaging arrays

1993-04-12

1994-11-29

Breneman, R. Bruce

Fishing, trapping, and vermin destroying

437 4, 437 53, 437100, 257225, 257290, 257291, H01L 3118

Patent

active

053690400

ABSTRACT:
An improved MOS photodetector having polysilicon gate material which is made more transparent to visible light by the addition of up to 50% carbon, and preferably about 10% carbon. The surfaces of the polysilicon-carbon gates are oxidized to form a silicon dioxide dielectric layer, thus eliminating the need to deposit a separate dielectric layer for isolation of adjacent gates in an overlapping gate array. The elimination of a separate dielectric layer permits all gates to be formed directly on the substrate dielectric layer, thus providing a uniform drive voltage requirement across the array.

REFERENCES:
patent: 4113515 (1978-09-01), Kooi et al.
patent: 4189826 (1980-02-01), Smith
patent: 4352237 (1982-10-01), Widmann
patent: 4780394 (1988-10-01), Blanchard et al.
patent: 4963953 (1990-10-01), Blanchard et al.
IEEE Transactions on Electron Devices, vol. 38, No. 8, Aug. 1991, S. Manabe, et al., "A 2-Million-Pixel CCD Image Sensor Overlaid with an Amorphous Silicon Photoconverstion Layer".
IEEE Electron Device Letters, vol. EDL-8, No. 8, Aug. 1987, H. Tsai, et al., "An Amorphous SiC/Si Two-Color Detector".
IEEE Electron Device Letters, vol. EDL-8, No. 2, Feb. 1987, K. C. Chang, et al., "The Amorphous Si/SiC Heterojunction Color-Sensitive Phototransistor".

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