Method of making thin film transistors

Details Method of making thin film transistors Method of making thin film transistors

1992-08-25

1994-04-26

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437229, 437913, 148DIG64, 148DIG105, 148DIG137, H01L 21265

Patent

active

053066537

ABSTRACT:
A method of making a thin film transistor exhibiting a high channel conductance includes the steps of forming, on an insulating transparent substrate, a gate electrode, an insulating layer, a semiconductor layer, a photoresist, in this order and performing a back substrate exposure at the insulating transparent substrate using the gate electrode as a photo mask, to form a photoresist pattern. The photoresist pattern is then baked to make it flow outward to a desired bottom width. The semiconductor layer is etched using the photoresist pattern as an etch mask to form a semiconductor layer pattern. On the resultant entire exposed surface are formed an ohm contact layer and a metal layer. The metal layer is then subjected to photoing and etching processes, to remove its portion disposed above the semiconductor pattern and its opposite side edge portions, thereby forming a metal layer pattern for source and drain electrodes. Using the metal layer pattern as an etch mask, the semiconductor layer is etched to form a through hole on the semiconductor layer pattern. On the resultant entire exposed surface, an insulation layer for a passivation is formed.

REFERENCES:
patent: 4587720 (1986-05-01), Chenevas-Paule et al.
patent: 4767723 (1988-08-01), Hinsberg, III et al.
patent: 4968638 (1990-11-01), Wright et al.
patent: 5071779 (1991-12-01), Tanaka et al.
patent: 5091337 (1992-02-01), Watanabe et al.
patent: 5130263 (1992-07-01), Possin et al.
patent: 5137841 (1992-08-01), Takeda et al.

Affiliated with

Also associated with

Rating

Method of making thin film transistors does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of making thin film transistors, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of making thin film transistors will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1711355