Method of making thin film device

Details Method of making thin film device Method of making thin film device

1985-03-27

1986-11-25

Weisstuch, Aaron

Metal working

Method of mechanical manufacture

Assembling or joining

136244, 136249, 136258, 148187, 357 30, H01L 3118, H01L 2714

Patent

active

046240454

ABSTRACT:
A thin film device such as an amorphous thin film solar battery is easily made with high integration by use of metal-diffused regions in the thin film as an electrical connection region across the thickness of the thin film. By use of such metal-diffused regions 24, 24 . . . for connection between transparent stripe shaped electrodes 21', 21'. . . disposed between glass substrate 20 and amorphous silicon thin film 23 and stripe shaped metal electrodes 25, 25 . . . on the top surface of the thin film 23, series connected solar battery cells can be made with a small number of process steps.

REFERENCES:
patent: 4042418 (1977-08-01), Biter
patent: 4334120 (1982-06-01), Yamano et al.
patent: 4428110 (1984-01-01), Kim
patent: 4443651 (1984-04-01), Swartz

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