Method of making tetrahedral amorphous carbon film including...

Details Method of making tetrahedral amorphous carbon film including... Method of making tetrahedral amorphous carbon film including...

2005-07-05

2005-07-05

Chen, Bret (Department: 1762)

Coating processes

Direct application of electrical, magnetic, wave, or...

Ion plating or implantation

C427S561000, C427S577000, C427S249700

Reexamination Certificate

active

06913795

ABSTRACT:
A method of making a tetrahedral amorphous carbon (ta-C) film comprises depositing carbon atoms over the surface of an object. The surface of the object is kept exposed to fluorine atoms during the deposition of the carbon atoms. The method allows the fluorine atoms to scatter within the deposited carbon atoms in the tetrahedral amorphous carbon film. The hardness of the tetrahedral amorphous carbon film can be improved in response to an increased content of sp3carbon bonds included within the tetrahedral amorphous carbon film. In addition, the tetrahedral amorphous carbon film still provides a sufficient repellent performance to water due to the fluorine atoms existing near the exposed surface of the tetrahedral amorphous carbon film.

REFERENCES:
patent: 5612134 (1997-03-01), Okita et al.
patent: 5846613 (1998-12-01), Neuville
patent: 5858477 (1999-01-01), Veerasamy et al.
patent: 5942328 (1999-08-01), Grill et al.
patent: 6147407 (2000-11-01), Jin et al.
patent: 6236543 (2001-05-01), Han et al.
patent: 6447891 (2002-09-01), Veerasamy et al.
patent: 6475573 (2002-11-01), Veerasamy et al.
patent: 6504294 (2003-01-01), Mahoney et al.
patent: 6638570 (2003-10-01), Veerasamy
patent: 8-147655 (1996-06-01), None
patent: 2000-222714 (2000-08-01), None
Weiler, M., “Highly tetrahedral, diamond-like amorphous hydrogenated carbon prepared from a plasma beam source.” Appl. Phys. Lett. 64(21) May 1994, pp. 2797-2799.

Affiliated with

Also associated with

Rating

Method of making tetrahedral amorphous carbon film including... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of making tetrahedral amorphous carbon film including..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of making tetrahedral amorphous carbon film including... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3379129