Method of making symmetrically controlled implanted regions usin

Fishing – trapping – and vermin destroying

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357 91, 437 20, 437 35, 437 36, 437930, H01L 21265

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active

047710128

ABSTRACT:
A method of fabricating a field effect transistor, wherein impurity diffusion layers of source and drain are formed by an ion implantation method using the gate electrode as the mask by inclining the semiconductor substrate with respect to the ion beam incident direction so as to prevent the channeling effect and also rotating it in planarity with respect to the ion beam scanning plane. As a result, impurity diffusion layers can be formed symmetrically with respect to the gate electrode.

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