Method of making strain sensor in fragile web

Details Method of making strain sensor in fragile web Method of making strain sensor in fragile web

1981-01-23

1982-03-09

Newsome, John H.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

156657, 338 2, 338 4, 357 26, 427 39, C23C 1108

Patent

active

043189369

ABSTRACT:
A method of making a strain gauge in a fragile web wherein the improvement resides in making the web after the gauge is substantially completely formed. This reverse sequence is made possible by a unique combination of plasma deposited silicon oxide and plasma deposited silicon nitride on top of the completed device to protect it from attack during silicon substrate etching to form the diaphragm.

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Rosler "Solid State Technology", (Apr. 1977), pp. 63-70.
Hollahan et al. "Technical Report No. PE-004", pp. 224-234, Sixth International Conference on Chemical Vap. Dep. (Oct. 1977).
Hiraiwa et al. "J. Appl. Phys.", vol. 18 No. 1, pp. 191-192 (1979).

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