Method of making stacked W-cell capacitor

Details Method of making stacked W-cell capacitor Method of making stacked W-cell capacitor

1992-11-19

1993-11-30

Thomas, Tom

Fishing, trapping, and vermin destroying

437 47, 437 48, 437 60, 437919, H01L 2170

Patent

active

052665135

ABSTRACT:
A stacked multi fingered cell (SMFC) capacitor using a modified stacked capacitor storage cell fabrication process. The SMFC is made up of polysilicon structure, having a multi-fingered cross-section, located at a buried contact and extending to an adjacent storage node overlaid by polysilicon with a dielectric sandwiched in between. The addition of the polysilicon structure increases storage capability 120% without enlarging the surface area defined for a normal stacked capacitor cell.

REFERENCES:
patent: 4977102 (1990-12-01), Ema
patent: 5071783 (1991-12-01), Ema
S. Inoue et al, "A Spread Stacked Capacitor (SSC) Cell for 64 mBit DRAMs" IEDM 89, pp. 31-34.
T. Ema et al., "3-Dimensional Stacked Capacitor Cell for 16 M DRAMs", IEDM 88, pp. 593-595.

Affiliated with

Also associated with

Rating

Method of making stacked W-cell capacitor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of making stacked W-cell capacitor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of making stacked W-cell capacitor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2095646