Method of making silicon nitride

Details Method of making silicon nitride Method of making silicon nitride

1984-12-31

1988-03-15

Cooper, Jack

Chemistry of inorganic compounds

Silicon or compound thereof

Binary compound

423406, 501 97, C01B 21068

Patent

active

047312351

ABSTRACT:
In the manufacture of silicon nitride powder by the vapor phase reaction of a silicon halide with ammonia at an elevated temperature in a flowing system, oxygen content of the silicon nitride is controlled by preventing entry of room air into the reaction means and by feeding wet nitrogen into the system at about the exit end of the reaction means.

REFERENCES:
patent: 3839541 (1974-10-01), Lumby et al.
patent: 4208215 (1980-06-01), Kleiner et al.

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