Metal working – Method of mechanical manufacture – Assembling or joining
Patent
1983-06-06
1986-05-13
Roy, Upendra
Metal working
Method of mechanical manufacture
Assembling or joining
29579, 148 15, 148175, 148187, 148DIG82, 357 233, 357 41, 357 91, H01L 2176, H01L 21302, H01L 21225
Patent
active
045877092
ABSTRACT:
A process for defining small dimensions by forming a vertical step in an etchable material; edge depositing a masking material by angularly evaporating a metal; and etching away all of the first material not covered by the masking material; and device obtained by depositing source, drain, and gate defining material.
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Fowler Alan B.
Hartstein Allan M.
International Business Machines - Corporation
Roy Upendra
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