Method of making secondary-electron emitters

Details Method of making secondary-electron emitters Method of making secondary-electron emitters

1977-05-31

1978-09-19

Weisstuch, Aaron

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

C23C 1500

Patent

active

041152280

ABSTRACT:
Thick, finely-grained films of cermets are fabricated using conventional techniques of sputtering the ceramic and the metal onto a substrate. The cermet is then subjected to differential sputtering in which the metal is sputtered away faster than the ceramic to leave a ceramic-rich surface layer having excellent secondary-electron-emission properties for low-energy incident electrons. Typical of such cermets are MgO/Au, MgO/Pt and MgO/Ag. The presence of metallic particles in the bulk of the films and the small size of the ceramic particles greatly reduce surface charging while allowing the emitter film to be made thick enough to have a long operating life under adverse device conditions.

REFERENCES:
patent: 3481854 (1969-12-01), Lane
patent: 3563873 (1971-02-01), Beyer
patent: 3761375 (1973-09-01), Pierce et al.
patent: 3809627 (1974-05-01), Sharp et al.
patent: 3879278 (1975-04-01), Grosewald etal.

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