Method of making polymer thin films for optical uses

Coating processes – Direct application of electrical – magnetic – wave – or... – Polymerization of coating utilizing direct application of...

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

427162, 427294, B05D 306

Patent

active

052177491

ABSTRACT:
A method is disclosed for the deposition of plasma films in which the optical index of refraction of the deposited film can be varied continuously or discontinuously as the material is deposited. The change in refractive index is accomplished by changing the input power applied to the plasma chamber. The method can be used to create optical wave guides from material of a single input monomer vapor.

REFERENCES:
patent: 3822928 (1974-07-01), Smolinsky et al.
Booth, Bruce L., "Low Loss Channel Waveguides in Polymers," 7 J. of Light Wave Technology 1445-1453 (Oct., 1989).
Cross, G. H., et al., "Polymeric Integrated Electro-Optic Modulators," 1177 Integrated Optics and Optoelectronics 79-91 (1989).
Davies, David H., et al., "Optical Application of Plasma Polymer Films," PMSE abstract.
McDonach, A., et al., "Polymeric Guided Wave Optics," 1177 Integrated Optics and Optoelectronics 67-78 (1989).
Ramey, Delvan A., "Polymer Waveguide Fabrication Techniques," 517 Integrated Opt. Circuit Engineering 106-109 (1984).
Schlotter, N. E., et al., "Fabrication of Channel Waveguides in Polydiacetylenes: Composite Diffused Glass/Polymer Structures," 56 Appl. Phys. Lett. 13-15 (Jan., 1990).
Sullivan, Charles T. and Anis Husain, "Guided-Wave Optical Interconnects for VLSI Systems," 881 Opt. Computing and Nonlinear Materials 172-176 (1988).
Szeto, R. and D. W. Hess, "Correlation of Chemical and Electrical Properties of Plasma-Deposited Tetramethylsilane Films," 52 J. Appl. Phys. 903-908 (Feb., 1981).
Thompson, L. F. and G. Smolinsky, "A Scanning Electron Microscope Study of Plasma-Polymerized Organosilicon Films Suitable for use as Lightguides. A Determination of the Cause of Signal Attenuation," J. Appl. Polymer Science 1179-1190 (1972).
Tien, P. K. and R. Ulrich, "Theory of Prism-Film Coupler and Thin-Film Light Guides," 60 J. Opt. Soc. Am. 1325-1337 (Oct., 1970).
Tien, P. K. and R. J. Martin, "Experiments on Light Waves in a Thin Tapered Film and a New Light-Wave Coupler," 18 Appl. Phys. Lett. 398-401 (May, 1971).
Tien, P. K., "Light Waves in Thin Films and Integrated Optics," Appl. Opt. 2395-2413 (Nov., 1971).
Tien, P. K., et al., "Formation of Light-Guiding Interconnections in an Integrated Optical Circuit by Composite Tapered-Film Coupling," 12 Appl. Opt. 1909-1916 (Aug., 1973).
Tien, P. K., et al., "Modes of Propagating Light Waves in Thin Deposited Semiconductor Films," 14 Appl. Phys. Lett. 291-294 (May, 1969).
Ulrich, R. and R. J. Martin, "Geometrical Optics in Thin Light Guides," 10 Appl. Opt. 2077-2085 (Sep., 1971).
Vasile, M. J. and G. Smolinsky, "Organosilicon Films Formed by an RF Plasma Polymerization Process," 119 J. Electrochem. Soc. 451-455 (Apr., 1972).
Walpita, L. M., "Organic Materials in Future Integrated Opto-Electronic Circuits," 1177 Integrated Optics and Optoelectronics 58-66 (1989).

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Method of making polymer thin films for optical uses does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of making polymer thin films for optical uses, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of making polymer thin films for optical uses will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-1932504

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.