Method of making planarizing non-conductive layers employing con

Details Method of making planarizing non-conductive layers employing con Method of making planarizing non-conductive layers employing con

1982-09-27

1984-12-04

Morgenstern, Norman

Coating processes

Electrical product produced

Superconductor

427 99, 427250, 4272551, 4272557, 427404, 156656, 1566591, H01L 3924

Patent

active

044864647

ABSTRACT:
During the manufacture of Josephson junction devices, it is necessary to provide superconducting layers for electrodes. During the manufacture of semiconductors, it is necessary to provide conductive paths and leads. A layer of conducting metal or superconducting metal may be vacuum deposited in such a manner that any predetermined pattern or shape of normally conducting metal is made transversely non-conducting. The layer metal which is transversely non-conductive is vacuum deposited in the presence of an inert gas at a pressure which is high enough to cause the evaporated and deposited metal to form islands of conductive metal separated by insulating voids to provide gross electrical anisotropy.

REFERENCES:
patent: 4129167 (1978-12-01), Sigsbee
patent: 4224361 (1980-09-01), Romankiw
patent: 4256816 (1981-03-01), Dunkleberger
patent: 4339305 (1982-07-01), Jones
patent: 4353935 (1982-10-01), Symersky
Greiner et al., Fabrication Process for Josephson Integrated Circuits, IBM J. Res. Develop., vol. 24, No. 2, Nov. 1980.

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