Method of making piezoelectric vibrator

Details Method of making piezoelectric vibrator Method of making piezoelectric vibrator

1977-01-28

1978-03-28

Hall, Carl E.

Metal working

Piezoelectric device making

58 23TF, H01L 4122

Patent

active

040806960

ABSTRACT:
A piezoelectric vibrator element is shaped by photo-etching techniques from a quartz crystal wafer. Film electrodes and masses for frequency adjustment are applied by first depositing a layer of chromium and then a layer of gold on the element by vacuum depositing or sputtering. The element is then kept in a high vacuum of at least 10.sup.-5 torr and at a high temperature of 300.degree. C to fix the depositions on the element and eliminate distortion. To adjust the frequency, a portion of the metal mass is removed by a laser beam, after which the element is kept in a high vacuum at high temperature to affix securely to the element any bits of metal that may have condensed during the removing step. .

REFERENCES:
patent: 3683213 (1972-08-01), Standte
patent: 3691720 (1972-09-01), Anderson et al.
patent: 3914836 (1975-10-01), Hafner et al.

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