Method of making photonic devices with SOG interlayer

Details Method of making photonic devices with SOG interlayer Method of making photonic devices with SOG interlayer

2005-08-30

2005-08-30

Nguyen, Tu T. (Department: 2877)

Optical waveguides

Planar optical waveguide

Reexamination Certificate

active

06937806

ABSTRACT:
A method of making a photonic device having at least two layers formed over a substrate, preferably by plasma enhanced chemical vapor deposition, involves depositing a thin spin-on glass (SOG) interlayer between at least one adjacent pair of layers to improve the roughness characteristics.

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