Metal treatment – Compositions – Heat treating
Patent
1979-07-31
1980-12-30
Rutledge, L. Dewayne
Metal treatment
Compositions
Heat treating
148175, 357 30, 357 61, 357 91, H01L 2126, H01L 21268, B23K 2600
Patent
active
042421497
ABSTRACT:
A semiconductor substrate is bombarded by ions of sufficient energy to perate the surface of the substrate to some average predetermined depth. The substrate is then scanned by a laser beam having a small diameter compared to the substrate thickness and having sufficient energy to heat the substrate to the predetermined depth. The heat allows surface damage on the substrate from the ion bombardment to heal, and allows the ions and substrate to form a compound to the predetermined depth with controllable redistribution. This compound is the photodetector of the method. The ions may be implanted through a mask to produce isolated detector regions, or the entire substrate surface may be bombarded, and those regions not desired for detector regions may be removed by a laser beam of sufficient energy to cause evaporation of a layer of the substrate. Exemplary substrate and ions are respectively cadmium telluride and mercury.
REFERENCES:
patent: 4081653 (1978-03-01), Koo et al.
patent: 4147563 (1979-04-01), Narayan et al.
patent: 4154625 (1979-05-01), Golovchenko et al.
patent: 4155779 (1979-05-01), Auston et al.
Marine et al., Appl. Phys. Letts. 23 (1973) 450.
Fiorito et al., Appl. Phys. Letts. 23 (1973) 448.
Campisano et al., Solid St. Electronics, 21 (1978) 485.
Kachurin et al., Sov. Phys. Semicond. 9 (1976) 946.
Fan et al., Appl. Phys. Letts. 34 (Jun. 1979) 780.
Donnelly et al., Appl. Phys. Letts. 20 (1972) 279.
Martin, Nuclear Inst. & Methods, 72 (1969) 223.
Dunn Aubrey J.
King Gerard J.
Dunn Aubrey J.
Edelberg Nathan
Gibson Robert P.
Roy Upendra
Rutledge L. Dewayne
LandOfFree
Method of making photodetectors using ion implantation and laser does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of making photodetectors using ion implantation and laser, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of making photodetectors using ion implantation and laser will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-5844