Method of making optical semi-conductor device

Details Method of making optical semi-conductor device Method of making optical semi-conductor device

1997-10-30

1999-05-25

Powell, William

Etching a substrate: processes

Forming or treating optical article

216 2, 216 59, 216 84, 216 52, 438690, B44C 122

Patent

active

059067535

ABSTRACT:
A method of manufacturing an optical semiconductor device including forming an optical waveguide on a substrate and forming an alignment mark on the substrate simultaneously with the optical waveguide. The alignment marks do not transmit infrared light and, when the substrate is mounted on an infrared transmissive submount, precise alignment can be achieved by observing transmitted light. Thus, the optical semiconductor device including the substrate is soldered at the desired location.

REFERENCES:
patent: 4317699 (1982-03-01), Winzer et al.
patent: 4598039 (1986-07-01), Fischer et al.
patent: 5375182 (1994-12-01), Chambers et al.
patent: 5459081 (1995-10-01), Kajita

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