Method of making nonvolatile memory array having cells with two

Details Method of making nonvolatile memory array having cells with two Method of making nonvolatile memory array having cells with two

1991-07-26

1992-09-15

Thomas, Tom

Fishing, trapping, and vermin destroying

437 43, 437 48, 437228, H01L 2170

Patent

active

051478161

ABSTRACT:
A nonvolatile memory cell having separate regions for programming and erasing. The cells are formed in an array at a face of a semiconductor body, each cell including a source that is part of a source-column line and including a drain that is part of a drain-column line. Each cell has first, second and third sub-channels between source and drain. The conductivity of the first sub-channel of each cell is controlled by a field-plate, which is part of a field-plate-column line, positioned over and insulated from the first sub-channel. The conductivity of each of the second sub-channels is controlled by a floating gate formed over and insulated from the second sub-channel. Each floating gate has a first tunnelling window positioned over the adjacent source-column line and has a second tunnelling window positioned over the adjacent drain-column line. Row lines, including control gates, are positioned over and insulated from the floating gates of the cells for reading, programming and erasing the cells. The row lines, including control gates, are also positioned over and insulated from the third sub-channels. The field-plate conductor permits programming of the cells through the first tunnelling window only and erasing of the cells through the second tunnelling window only, or vice versa.

REFERENCES:
patent: 4827750 (1989-04-01), Periegos et al.
patent: 4833096 (1989-05-01), Huang et al.
patent: 4853895 (1989-08-01), Mitchell et al.
patent: 4924437 (1990-05-01), Paterson et al.
patent: 4980309 (1990-12-01), Mitchell et al.
patent: 4994403 (1991-02-01), Gill

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