Coating processes – Electrical product produced – Condenser or capacitor
Patent
1980-09-15
1981-09-08
Smith, John D.
Coating processes
Electrical product produced
Condenser or capacitor
148 15, 148 63, 427 93, 427 94, 427124, 4271263, 430314, 430315, H01L 21316, H01L 21318
Patent
active
042884705
ABSTRACT:
Non-volatile metal-insulator-semiconductor memory elements are fabricated using a novel sequence of steps for forming multiple dielectric layers including particularly a layer of titanium dioxide covering a layer of silicon dioxide covering a layer of silicon nitride. The titanium dioxide of a type known as rutile is formed by evaporation of titanium upon the silicon dioxide and oxidization of the titanium in an oxygen ambient at high temperatures.
REFERENCES:
patent: 4105805 (1978-08-01), Glendinning et al.
patent: 4200474 (1980-04-01), Morris
Agusta et al., "Metal-Insulator-Trap-Oxide-Semiconductor Memory Cell", IBM TDB, 13, No. 12, May 1971, p. 3636.
Bate Robert T.
Morris Henry B.
Comfort James T.
Hiller William E.
Sharp Melvin
Smith John D.
Texas Instruments Incorporated
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