Method of making miniature high frequency SC-cut quartz crystal

Details Method of making miniature high frequency SC-cut quartz crystal Method of making miniature high frequency SC-cut quartz crystal

1983-12-08

1985-11-26

Rosenbaum, Mark

Metal working

Piezoelectric device making

156636, 156645, H04R 1700

Patent

active

045547173

ABSTRACT:
Miniature high frequency SC-cut quartz crystal resonators are made from a plano-plano SC-cut quartz crystal wafer by chemically polishing the wafer; then chemomechanically polishing the chemically polished wafer; then chemically polishing the chemomechanically polished wafer; depositing a suitable pattern of etch resist on the wafer using standard photolithographic techniques; chemically polishing the wafer; stripping the photoresist from the wafer; placing a suitable evaporative mask pattern into intimate contact with the wafer; depositing a suitable pattern of electrodes on the wafer; testing the resonators so formed on the wafer; selectively separating those resonators having the desired properties; mounting the selected resonators into an enclosure; adjusting the frequency of the selected resonators to the exact frequency desired; and hermetically sealing the enclosure.

REFERENCES:
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patent: 3694677 (1972-09-01), Guttwein et al.
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patent: 4393131 (1983-07-01), Whalin et al.
patent: 4472652 (1984-09-01), Brice et al.
patent: 4475981 (1984-10-01), Rea
Ecom; "Chemically Polished Quartz"; 6-1-77; Vig. LeBus, & Filler; Electros Technology & Devices Laboratory.

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