Method of making microelectronic field emission device with air

Details Method of making microelectronic field emission device with air Method of making microelectronic field emission device with air

1992-04-08

1993-01-26

Ramsey, Kenneth J.

Electric lamp or space discharge component or device manufacturi

Process

With assembly or disassembly

156656, 1566611, 445 50, H01J 914

Patent

active

051818744

ABSTRACT:
A field emission device employs an anode in the form of an air bridge spanning the tip of a field emission cathode. The anode is supported only at its opposite ends, leaving the area under the air bridge open. An array of cathode emitters employ a series of parallel, laterally spaced anode air bridges, with each air bridge spanning a line of cathodes. The lateral spacing between the air bridges facilitates both the removal of underlying photo-resist during fabrication, and the establishment of a uniform vacuum if desired. The clearance between the anode and cathode is substantially less than previously obtainable, resulting in a significant reduction in both size and in the anode's operating voltage level. Fabrication of the air bridge anodes can be integrtaed with the remainder of an integrated circuit.

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K. Skidmore, "Industry News-The Comeback of the Vacuum Tube: Will Semiconductor Versions Supplement Transistors?", Semiconductor International, Aug. 1988, pp. 15-18.
C. A. Spindt, et al. "Field Emission Array Development", 33rd Int'l Field Emission Symposium, Jul., 1986, pp. 1-11.

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