Fishing – trapping – and vermin destroying
Patent
1992-02-24
1993-07-13
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437 12, 437197, 148DIG60, H01L 21306
Patent
active
052273148
ABSTRACT:
A mobile ion getterer is added to metalization layers on an integrated circuit or discrete device to reduce mobile ion contamination therein. Preferably, chromium is used as the mobile ion getterer and is added to an aluminum target used as the metal source for sputtering the chromium and aluminum onto the integrated circuit or discrete device. This technique removes the need for ultrahigh purity aluminum conductors or gettering material (P-glass) in contact with the metal conductors. This technique may be used with virtually all metalization apparatus and processes used for depositing metal onto semiconductor devices.
REFERENCES:
patent: 4017890 (1977-04-01), Howard et al.
patent: 4053335 (1977-10-01), Hu
patent: 4154874 (1979-05-01), Howard et al.
patent: 4349395 (1982-09-01), Toyokura et al.
patent: 4561009 (1985-12-01), Yonezawa et al.
patent: 4563368 (1986-01-01), Tihanyi et al.
patent: 4732865 (1988-03-01), Evans et al.
patent: 4899206 (1990-02-01), Sakurai et al.
C. A. Hippsley et al., "Effects of Chromium on Crack Growth and Oxidation . . . " Acta Mettal. Material, vol. 38, No. 12, pp. 2393-2410, Dec. 1990.
VLSI Technology, First Edition, 1983, pp. 255-257, by Sze.
Brown George N.
Howard Luke J.
Rimmler William F.
AT&T Bell Laboratories
Hearn Brian E.
Holtzman Laura M.
McLellan Scott W.
LandOfFree
Method of making metal conductors having a mobile inn getterer t does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of making metal conductors having a mobile inn getterer t, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of making metal conductors having a mobile inn getterer t will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2311470