Metal working – Method of mechanical manufacture – Assembling or joining
Patent
1983-11-28
1986-07-01
Roy, Upendra
Metal working
Method of mechanical manufacture
Assembling or joining
148 15, 148175, 148DIG84, 372 45, 372 46, H01S 318, H01L 21208
Patent
active
045971650
ABSTRACT:
The property of materials in the InP system, whereby helium ion or deuteron bombarded p-type material becomes highly resistive but n-type material remains relatively conductive, is utilized to fabricate integrated circuits which include buried semiconductor interconnections or bus bars between devices.
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Capasso Federico
Focht Marlin W.
Macrander Albert T.
Schwartz Bertram
AT&T Bell Laboratories
Roy Upendra
Urbano Michael J.
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