Metal working – Method of mechanical manufacture – Assembling or joining
Patent
1982-10-28
1984-03-20
Smith, John D.
Metal working
Method of mechanical manufacture
Assembling or joining
427 63, 427 99, 427250, 427255, 4272551, 4272553, 4272557, 156643, H01L 3922
Patent
active
044372272
ABSTRACT:
During the manufacture of Josephson superconducting devices, it is necessary to provide on a substrate a base electrode, a counter electrode and a small tunnel barrier area therebetween. A novel method of making all three of these active elements in the same vacuum chamber without having to remove the substrate from the vacuum chamber is provided so that the tunnel barrier area is accurately made to a predetermined size and without the danger of contamination. The novel structure is made as a substantially planarized laminate in the vacuum chamber and the tunnel barrier area is defined in a supplemental step.
REFERENCES:
patent: 4129167 (1978-12-01), Sigsbee
Ames, IBM Journal of Research and Development, vol. 24, No. 2, Mar. 1980, pp. 188-194.
Greiner et al., IBM Journal of Research and Development, vol. 24, No. 2, Mar. 1980, pp. 195-205.
Flannery William E.
Josephs Richard M.
Stein Barry F.
Wang Tsing-Chow
Young Peter L.
Bueker Richard
Scott Thomas J.
Smith John D.
Sowell John B.
Sperry Corporation
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