Metal treatment – Compositions – Heat treating
Patent
1981-06-02
1983-09-06
Rutledge, L. Dewayne
Metal treatment
Compositions
Heat treating
148174, 29572, 29576B, 29576T, 136258, 357 2, H01L 21203, H01L 21263
Patent
active
044027621
ABSTRACT:
A method of modifying amorphous films of Group IV elements such as silicon and germanium and alloys thereof with carbon by the addition of Group I elements hydrogen and/or Group VII elements fluorine and chlorine in which an amorphous film of the Group IV elements or alloys thereof is vacuum deposited on a substrate at a temperature equal to or slightly above room temperature, the film is annealed in an inert gas or in a vacuum and the annealed film is modified by bombardment with an energetic current of ions or atoms of the Group I and/or Group VII elements by means of a plasma gun or ion gun having characteristics similar to a thetatron.
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Chik, K. P., et al., Solid State Communications, vol. 33, pp. 1019-1023, 1980.
Dembinski, M. et al., Applied Physics Letters, vol. 34, No. 9, (May 1, 1979), pp. 553-555.
Jang, J. et al., Journal of Non-Crystalline Solids, vol. 35-36, (1980), pp. 313-318.
Chik Kin P.
John Puthenveetil K.
Tong Bok Y.
Wong Sau K.
Rutledge L. Dewayne
Schiavelli Alan E.
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