Method of making highly discriminating optical edge filters...

Details Method of making highly discriminating optical edge filters... Method of making highly discriminating optical edge filters...

2006-06-27

2006-06-27

Assaf, Fayez G. (Department: 2872)

Optical: systems and elements

Light interference

Produced by coating or lamina

C359S587000, C359S588000, C359S580000

Reexamination Certificate

active

07068430

ABSTRACT:
Highly discriminating optical edge filters and methods of making the same are disclosed. The optical edge filters have an edge steepness greater than about 0.8% as measured by dividing (a) the edge width from the 50% transmission wavelength to the optical density 6 (“OD6”) wavelength by (b) the 50% transmission wavelength. The optical filters also have an average transmission above about 95%. The methods for making such filters accurately determine when deposition of each layer of the filter should terminate. The methods include calculating theoretical transmission data for a layer of the filter and calculating an expected deposition duration for the layer. The methods also include measuring transmission through the layer during deposition for a period less than the expected deposition duration. When the measuring period elapses, a new deposition duration is calculated based upon the theoretical transmission data and the measured transmission data, thereby providing an accurate deposition duration for the layer.

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