Method of making high oxygen chromium target

Details Method of making high oxygen chromium target Method of making high oxygen chromium target

1994-11-21

1996-10-01

Mai, Ngoclan

Powder metallurgy processes

Powder metallurgy processes with heating or sintering

Metal and nonmetal in final product

419 29, 419 49, 419 53, B22I 315

Patent

active

055618332

ABSTRACT:
To provide a raw material for high oxygen chromium targets containing oxygen in a form capable of effectively preventing the dust ejection phenomenon. A raw material for high oxygen chromium targets comprising chromium crystalline particles dispersed in metallic chromium wherein at least a portion of the surface of all the crystals constituting the oxide crystalline particles is in contact with the matrix of the metallic chromium. A method of producing a raw material for high oxygen chromium targets comprising chromium oxide crystalline particles dispersed in metallic chromium characterized by heat-treating metallic chromium containing a solid solution of oxygen or oxide particles as a starting material, and precipitating or crystal-growing the oxygen or oxide particles as chromium oxide crystalline particles having a particle size of 0.1 to 100 .mu.m, thereby obtaining a raw material for chromium targets.

REFERENCES:
patent: 4917722 (1990-04-01), Kuniya et al.
patent: 5092921 (1992-03-01), Kobayashi et al.
patent: 5391215 (1995-02-01), Kobayashi et al.
patent: 5403543 (1995-04-01), Okutomi et al.

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