Method of making glazed AlN substrate with an Al.sub.2 O.sub.3 -

Details Method of making glazed AlN substrate with an Al.sub.2 O.sub.3 - Method of making glazed AlN substrate with an Al.sub.2 O.sub.3 -

1994-02-08

1995-11-14

Utech, Benjamin

Coating processes

With post-treatment of coating or coating material

Heating or drying

427377, 4273777, 4274191, B05D 302

Patent

active

054664888

ABSTRACT:
A glazed AlN substrate includes: a sintered AlN body, a surface oxidized layer formed on the sintered AlN body, an Al.sub.2 O.sub.3 --SiO.sub.2 layer formed on top of the intermediate surface oxidized layer, and a glass layer formed on top of the Al.sub.2 O.sub.3 --SiO.sub.2 layer. In one embodiment, an additional SiO.sub.2 layer is interposed between the glass layer and the Al.sub.2 O.sub.3 --SiO.sub.2 layer. A method of producing the AlN substrate is also disclosed that permits firing of the glass layer at high temperatures.

REFERENCES:
patent: 4517584 (1985-05-01), Matsushita et al.
patent: 4659611 (1987-04-01), Iwase et al.
patent: 5087509 (1992-02-01), Kuromitsu et al.
patent: 5096768 (1992-03-01), Kuromitsu et al.
patent: 5184399 (1993-02-01), Ueno et al.
patent: 5213877 (1993-05-01), Yoshida et al.

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