Method of making field-plate isolated CMOS devices

Fishing – trapping – and vermin destroying

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148DIG82, 357 42, 357 91, 437 25, 437 26, 437 34, 437 52, 437 57, H01L 21263, H01L 2978, H01L 2704

Patent

active

046960929

ABSTRACT:
A dynamic read/write memory or the like is made by a twin-well CMOS process that employs field-plate isolation rather than thick field oxide, with no separate channel stop implant. The field plate is grounded over P well areas, and connected to the positive supply over the N wells. One-transistor memory cells are of metal-gate construction with N+ drain regions buried beneath oxide, and other transistors are constructed with silicided, implanted, source/drain regions, self-aligned to the metal gates, employing sidewall oxide spacers to provide lightly-doped drains.

REFERENCES:
patent: 4411058 (1983-10-01), Chen
patent: 4535530 (1985-08-01), Denda et al.
patent: 4570331 (1986-02-01), Eaton et al.

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