Method of making FET utilizing shadow masking and diffusion from

Details Method of making FET utilizing shadow masking and diffusion from Method of making FET utilizing shadow masking and diffusion from

1980-05-12

1982-09-28

Rutledge, L. Dewayne

Metal working

Method of mechanical manufacture

Assembling or joining

29578, 29579, 148 15, 148188, 156628, 156644, 156653, 156657, 357 22, 357 91, H01L 2131, H01L 21265, H01L 21225

Patent

active

043510990

ABSTRACT:
A novel self-align type method of making an FET with a very short gate length and a good high frequency characteristic, and a low noise characteristic, the method comprising the steps of:

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patent: 3940288 (1976-02-01), Takagi et al.
patent: 3980508 (1976-09-01), Takamiya et al.
patent: 4075652 (1978-02-01), Umebachi et al.
patent: 4084987 (1978-04-01), Godber
patent: 4149904 (1979-04-01), Jones

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