Metal working – Method of mechanical manufacture – Electrical device making
Patent
1998-08-20
1999-11-23
Arbes, Carl J.
Metal working
Method of mechanical manufacture
Electrical device making
29830, 29852, H01P 1100
Patent
active
059877324
ABSTRACT:
The invention relates to a method for producing low cost integrated microwave assemblies, where a photoresist layer is deposited onto a substrate, a portion of the photoresist is selectively removed, a first conductive layer is applied, and, a second portion of the photoresist is removed leaving isolation walls and cavities. Electrical components are placed in the cavities and a first dielectric layer fills the cavities. Vias are created in the first dielectric material exposing the electrical contacts, a second conductive layer is applied into the vias and over the first dielectric material. The second conductive layer is patterned by removing a portion of the second conductive layer creating a signal line pattern in the second conductive layer.
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Davidheiser Roger A.
Lau James C.
Lee Alfred E.
Arbes Carl J.
Thousand Connie M.
TRW Inc.
Yatsko Michael S.
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